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Last modification on : Thursday, February 7, 2019 - 4:56:13 PMReactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2

(SF_6+CF_4)-

The electron-induced experiment is very ive to gas impurities, and theA similar experiment for CF4 (to {CF3+ + F + e-), SF6 (to SF5+

LW3-12IG/630-16__

Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products. Applied Physics Letters, American Institute of Physics, 2001,

Electron swarm coefficients in SF6 and CF4 gas mixtures from

The European Physical Journal Applied Physics (EPJ AP) an international journal devoted to the promotion of the recent progresses in all fields

in 50%SF6-50%CF4mixtures at 1 atm -

2017101-(averages over the edfs) in pure gases or gas mixtures over a range of(DS) in SF6 and CF4 gases at the level of the two-term approximatio

c-C_4F_8/CF_4SF_6SST-200806

The film's deposition rate was found to increase with the decreasing CF4 concentration in the gas mixture. Fourier transform spectroscopy revealed the

in the dielectric strength of SF6+CF4+Ar mixtures (a) 40%

Download scientific diagram| The synergism in the dielectric strength of SF6+CF4+Ar mixtures (a) 40% Ar black line, (b) 50% Ar red line, (c)

of Si and WSiN Using ECR Plasma of SF6–CF4 Gas Mixture -

The characteristics of Si etching with electron cyclotron resonance (ECR) plasma of SF6–CF4 are studied in order to improve anisotropy in dry etching

GISCF4 - EMT

g3 gas with 4% NOVECTM 4710/96% CO2 was gas or gas mixture for substituting SF6. Trifluoroiodomethane (CF3I) has been introduced

SF_6/N_2SF_6/CF_4-

The fluorination of the polymer polyethylene terephthalate in plasma created from SF6 or CF4 gas at various pressures was investigated. The surface was

Use of SF6 and CF4 | SpringerLink

The design and use of equipment and installations applying SF6 gas or SF6/CF4 gas mixtures have been considered in Sect.  12.2and Part C of this

of Si and WSiN using ECR plasma of SF6-CF4 gas mixture

Anisotropic etching of Si and WSiN using ECR plasma of SF6-CF4 gas mixture on ResearchGate, the professional network for scientists. Anisotropic etchin

SF6 gas,CF4 gas,liquid ammonia,methane,standard gas mixture-

specialized in manufacturing electronic gas(SF6 gas),high purity gas and kinds of specialty gas and types of steel cylinders,such as SF6,CF4,NH3,HCL,

HD-RF400C SF6,SF6-

We use a binary gas mixture Monte Carlo simulation model to calculate the electron transport parameters in SF6/CF4 mixtures in uniform electric fields

field breakdown characteristics of SF6/CF4 mixtures at

The breakdown and the corona inception voltages experiments of SF<sub>6</sub>/CF<sub>4</sub> mixtures in non-uniform

LW16-35/1250-31.5__

specialized in manufacturing electronic gas(SF6 gas),high purity gas and kinds of specialty gas and types of steel cylinders,such as SF6,CF4,NH3,HCL,